Finite Element Analysis on Dynamic Viscoelasticity of CMP Polishing Pad
- Resource Type
- Journal
- Language
- Korean
- Region
- Korea
- Price
- $68.00
- Article Title
- Finite Element Analysis on Dynamic Viscoelasticity of CMP Polishing Pad
- Publication
- Journal of the Korean Society for Precision Engineering
- ISSN
- 1225-9071
- Volume
- 36
- Issue
- 2
- Year
- 2019
- Pages
- 177-181
- Data Format
- Subject Fields
- Engineering
- Note
- Full text is usually delivered within 1-2 hours
