Sacrificial Anodic Oxidation of 6H-SiC
- Resource Type
- Journal
- Language
- English
- Region
- Japan
- Price
- $68.00
- Article Title
- Sacrificial Anodic Oxidation of 6H-SiC
- Publication
- JAPANESE JOURNAL OF APPLIED PHYSICS (PART 2 LETTERS)
- ISSN
- 0021-4922
- Volume
- 40
- Issue
- 11A
- Year
- 2001
- Pages
- L1145-L1147
- Authors
- Kato, M.; Ichimura, M.; Arai, E.
- Data Format
- Subject Fields
- Biology